发明名称 |
Latchable microelectromechanical structures using non-newtonian fluids, and methods of operating same |
摘要 |
Mounting systems for micro-electromechanical system (MEMS) structures are provided including a non-Newtonian fluid having a threshold viscosity that is positioned between a MEMS base member and the MEMS structure so as to position the MEMS structure relative to the base member. A MEMS actuator is coupled to the MEMS structure. The MEMS actuator is positioned to cause movement of the MEMS structure relative to the MEMS base member by generating a force sufficient to exceed the threshold viscosity of the non-Newtonian fluid when the MEMS actuator is actuated. The MEMS structure may be a MEMS mirror positioned for pivotal movement about a bearing member to control tilt of the MEMS mirror. |
申请公布号 |
US6522452(B2) |
申请公布日期 |
2003.02.18 |
申请号 |
US20010842602 |
申请日期 |
2001.04.26 |
申请人 |
JDS UNIPHASE CORPORATION |
发明人 |
WOOD ROBERT L. |
分类号 |
B81B3/00;B81C3/00;G02B26/08;H02K57/00;(IPC1-7):G02B26/00;G02B26/02 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|