| 摘要 |
PURPOSE: An oxide structure usable for an optical waveguide and a method of forming the oxide structure are provided to produce a plurality of substrates coated with oxide film in a short time. CONSTITUTION: Gaseous reactants are introduced into each of the chambers(20,30,40) through gas lines. Once reactants have been introduced in a chamber, a chemical reaction is proceeded and the product of that reaction forms a layer or film of material on the exposed surface of the substrate that is moving through the chamber on a conveyor belt(50). In order to isolate the chambers(20,30,40) from each other and to allow for separate chemical reactions to occur in each of the chambers(20,30,40), sets of curtains(70) are preferably positioned between the chambers(20,30,40) and inert gas lines(80) pump inert gas between the chambers(20,30,40). The inert gas typically flows through the curtains(70) and into one of the chambers(20,30,40), thereby forcing all of the gaseous reactants to remain in the chambers into which the gaseous reactants were introduced.
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