发明名称 |
ELECTRON BEAM GENERATING DEVICE, AND PHOTOELECTRIC SURFACE HOUSING CARTRIDGE |
摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam generating device which does not require the user to form a photoelectric surface film. SOLUTION: A photoelectric surface 31 used for an electron beam generating device 1 is housed in a photoelectric plane housing cartridge 3. The photoelectric plane housing cartridge 3 has a lid having a metal film to be broken just before the first use. The photoelectric plane housing cartridge 3 housed in a stand-by chamber 71 is pushed out toward a film breaker 9 housed in a laser beam irradiation chamber 73 by a push-out pipe 13. Levers 92, 95 of the film breaker 9 are pushed by the photoelectric plane housing cartridge 3 when it is pushed out, and the metal film as a lid of the photoelectric plane housing cartridge 3 is broken according as a conical surface 91 of the film breaker 9 opens.
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申请公布号 |
JP2003045368(A) |
申请公布日期 |
2003.02.14 |
申请号 |
JP20010228089 |
申请日期 |
2001.07.27 |
申请人 |
HAMAMATSU PHOTONICS KK |
发明人 |
SASABE JUN;SUZUKI SHIGEJI;IIGAMI YOSHIKI |
分类号 |
G21K1/00;G03F7/20;G21K5/04;H01J37/073;H01L21/027;(IPC1-7):H01J37/073 |
主分类号 |
G21K1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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