FINE SHAPE MAKING PROCESS AND METHOD OF MAKING MASTER OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a process of making shapes having high resolution, excellent surface characteristics and high uniformity without changing the optical system of an exposure device in a technique of forming patterns by light exposure of a photoresist. SOLUTION: A laminate having a positive type photoresist layer, a photoresist layer subjected to alkaline treatment and a layer which is increased in light transmittance by photoirradiation in this order on a substrate is irradiated with light and the patterns are formed thereon by exposure.