发明名称 |
Pedestal with integral shield |
摘要 |
Generally, a substrate support member for supporting a substrate is provided. In one embodiment, a substrate support member for supporting a substrate includes a body coupled to a lower shield. The body has an upper surface adapted to support the substrate and a lower surface. The lower shield has a center portion and a lip. The lip is disposed radially outward of the body and projects towards a plane defined by the first surface. The lip is disposed in a spaced-apart relation from the body. The lower shield is adapted to interface with an upper shield disposed in a processing chamber to define a labyrinth gap that substantially prevents plasma from migrating below the member. The lower shield, in another embodiment, provides the plasma with a short RF ground return path.
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申请公布号 |
US2003029564(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
US20020128983 |
申请日期 |
2002.04.24 |
申请人 |
BROWN KARL;MEHTA VINEET;PHAN SEE-ENG;SHERSTINSKY SEMYON;LAU ALLEN |
发明人 |
BROWN KARL;MEHTA VINEET;PHAN SEE-ENG;SHERSTINSKY SEMYON;LAU ALLEN |
分类号 |
H01J37/32;H01L21/00;(IPC1-7):C23F1/00;C23C16/00 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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