发明名称 |
Micro-electro-mechanical mirror devices having a high linear mirror fill factor |
摘要 |
An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.
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申请公布号 |
US2003031403(A1) |
申请公布日期 |
2003.02.13 |
申请号 |
US20020085963 |
申请日期 |
2002.02.28 |
申请人 |
CORNING INTELLISENSE CORPORATION |
发明人 |
TAYLOR WILLIAM PATRICK;CARLEN EDWIN THOMAS;MASTRANGELO CARLOS HORACIO;BERNSTEIN JONATHAN JAY |
分类号 |
G02B6/35;G02B7/182;G02B26/08;(IPC1-7):G02B6/35;G02B5/08 |
主分类号 |
G02B6/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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