| 摘要 |
PROBLEM TO BE SOLVED: To provide an equipment and a method for measuring the jitters of a waveform to be measured in a short time with high precision, and a semiconductor integrated circuit tester. SOLUTION: A control circuit 20 outputs a start pulse ST for starting jitter measurement to an RS flip-flop 22. The RS flip-flop 22 outputs a signal S1 of 'H' level by the start pulse ST. By integrating this signal S1 by an integration circuit 23, the time having passed after the inputting of the start pulse ST to the RS flip-flop 22 is clocked. If a waveform WF to be measured exceeds a threshold value Vth , a stop pulse SP is outputted from a comparator 21, and the signal S1 becomes 'L' level. Accordingly, jitters are found by converting the integrated value of the integration circuit 23 into a digital data by an ADC circuit 25, and converting it into a time according to a table stored in a data map 27 after that.
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