发明名称 MEMBER FOR CONVEYING SEMICONDUCTOR
摘要 <p>PROBLEM TO BE SOLVED: To improve the resistance against wear of a tip face of a suction nozzle. SOLUTION: At least the tip face 12A of the suction nozzle 12 is formed by an ultrahard sintered body 16 made of diamond or cBN mainly. A chip 15 forming a layerlike sintered body formed by sintering and forming cemented carbide 17 and the ultrahard sintered body 16 integrally is formed at a tip of a suction nozzle main body 14 made of cemented carbide by brazing a face made of the cemented carbide 17 to constitute the suction nozzle 12. Earth 18 is connected with the ultrahard sintered body 16. The suction nozzle 12 is detachably bonded on a base metallic unit 11.</p>
申请公布号 JP2003039368(A) 申请公布日期 2003.02.13
申请号 JP20010221867 申请日期 2001.07.23
申请人 MITSUBISHI MATERIALS CORP 发明人 FUKUDA TSUTOMU;TAKAHASHI TAKESHI
分类号 B25J15/06;H01L21/677;H01L21/68;(IPC1-7):B25J15/06 主分类号 B25J15/06
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