发明名称 ELECTRONIC COMPONENT
摘要 The invention relates to an electronic component (1) comprising a substrate layer (2), a buffer layer (3) positioned on the latter, a cover layer (8) that is applied over the buffer layer (3) and at least two channel layers (7a, 7b) located between the buffer layer (3) and the cover layer (8). According to the invention, each channel layer (7a, 7b) consists of piezo-polar material and at least one intermediate layer (6) is provided between each pair of adjacent channel layers (7a, 7b). At least the area surrounding one of the boundary surfaces between the first channel layer (7b, 7c) and/or the lower channel layer (7a) and one of the layers (3, 4a, 5a, 4b, 5b, 8) that is adjacent to the upper or lower channel layer (7a, 7b, 7c, ...) is doped, forming a compensation layer (4a, 4b), in such a way that the piezo charges occurring on each doped boundary surface are partially or fully compensated.
申请公布号 WO03012877(A2) 申请公布日期 2003.02.13
申请号 WO2002EP08102 申请日期 2002.07.19
申请人 KOHN, ERHARD;DAUMILLER, INGO;KUNZE, MIKE 发明人 KOHN, ERHARD;DAUMILLER, INGO;KUNZE, MIKE
分类号 H01L29/20;H01L29/778;H01L29/812 主分类号 H01L29/20
代理机构 代理人
主权项
地址