| 摘要 |
A piezo-electric device has a base including a cavity opened on a first surface of the base, a first electrode layer formed on a second surface of the base, a piezo-electric layer laminated on the first electrode layer, and an auxiliary electrode layer formed on the second surface of the base. Between the first electrode layer and the auxiliary electrode layer, an insulating gap for ensuring the insulating state between both electrode layers is formed. The insulating gap is formed away from the position corresponding to the periphery of the cavity. The piezo-electric device can prevent a generation of cracks in the piezo-electric layer.
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