发明名称 Anisotropic etching of optical components
摘要 An anisotropically etched prism assembly including a device portion, a light coupling portion, and an alignment portion. The anisotropically etched prism assembly having a plurality of optical devices arranged in a first fixed pattern. Each pair of said plurality of optical devices spaced a first prescribed distance apart. The light coupling portion including a plurality of anisotropically etched prisms. Each one of the plurality of anisotropically etched prisms is arranged in second fixed pattern so as to correspond with a respective one of the plurality of optical devices. Each one of the pairs of said plurality of anisotropically etched prisms are spaced a second prescribed distance apart, the second prescribed distance substantially equals the first prescribed distance. The alignment portion aligns the light coupling portion and the device portion. Each one of said plurality of anisotropically etched prisms are aligned with a respective one of said plurality of optical devices.
申请公布号 US2003032286(A1) 申请公布日期 2003.02.13
申请号 US20010991371 申请日期 2001.11.10
申请人 DELIWALA SHRENIK;MONTGOMERY ROBERT KEITH 发明人 DELIWALA SHRENIK;MONTGOMERY ROBERT KEITH
分类号 G02B5/04;G02B6/10;G02B6/12;G02B6/122;G02B6/124;G02B6/28;G02B6/34;G02B6/42;G02B6/43;G02B27/28;G02F1/01;G02F1/015;G02F1/025;G02F1/295;H01L27/12;(IPC1-7):H01L21/302;H01L21/461 主分类号 G02B5/04
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