| 摘要 |
PROBLEM TO BE SOLVED: To secure the amplitude of driving vibration of a vibrator without decreasing it even if the amplitude of vibration of an exciting means is made small as to a vibration type angular speed sensor. SOLUTION: The angular speed sensor is equipped with vibrators 30 and 40 which are coupled with a base 20, comb-shaped exciting means 34 and 44 which cause vibration to drive and vibrate the vibrators 30 and 40 between opposite teeth in a direction (x), and comb-shaped detecting means 70 and 80 which detect an angular speed Ωaccording to the vibration of the vibrators 30 and 40 in a direction (y) when the angular speed Ω is applied. Further, the sensor is equipped with a beam means 60 which has a fulcrum 61 as a fixed point, an operation point 62 connected to the vibrators, and a force point 63 connected to the exciting means; and which expands and transmits the displacement of the force point 63 due to the vibration of the exciting means 34 and 44 to the vibrators 30 and 40, as a beam which connects the vibrators 30 and 40 and exciting means 34 and 44. |
