发明名称 Anti-vibration system for exposure apparatus
摘要 An anti-vibration system with air dampers of high natural frequency, in small space. There are a pair of air dampers disposed with their driving directions opposed to each other, and inside pressures of these dampers can be changed to variably set the natural vibration frequency.
申请公布号 US2003030779(A1) 申请公布日期 2003.02.13
申请号 US20020263311 申请日期 2002.10.03
申请人 CANON KABUSHIKI KAISHA 发明人 HARA HIROMICHI
分类号 F16F15/02;G03F7/20;H01L21/027;(IPC1-7):G03B27/42 主分类号 F16F15/02
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