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发明名称
Substrate holder and reaction apparatus
摘要
申请公布号
EP0676793(B1)
申请公布日期
2003.02.12
申请号
EP19950302288
申请日期
1995.04.05
申请人
CANON SALES CO., INC.;ALCAN-TECH CO., INC.;SEMICONDUCTOR PROCESS LABORATORY CO., LTD.
发明人
MAEDA, KAZUO;OHIRA, KOUICHI;NISHIMOTO, YUHKO
分类号
H01L21/205;C30B25/12;C23C16/458;C23C16/507;H01L21/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/00;H01L21/68;C23C16/44
主分类号
H01L21/205
代理机构
代理人
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地址
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