发明名称 Cathode cartridge and anode cartridge of testing device for electroplating
摘要 To provide a cathode cartridge, which comprises a tabular cathode conductor 5, which has an open hole having a same shape to that of plated pats 2a of a plated base 2 as a negative plate, which has a plurality of a protruding portion that presses contact to a peripheral part 2d around the plated parts 2a, a first elastic thin board 3, which covers a rear side of the plated base 2 and has a recess 3a, a tabular rear wall insulator 6, which covers both a back side of the cathode conductor 5 and a back side of the first elastic thin board 3, and has a recess 6b, a tabular front side insulator 7, which has an aperture having the same shape to that of the plated parts 2a, which covers a front side of the cathode conductor 5, and has a recess 7b, into which the cathode conductor 5 gets just, and a second elastic thin board 4, which has an aperture (open hole) having the same shape to that of the plated parts 2a, which is sandwiched between the cathode conductor 5 to provide a cathode cartridge of testing device for electroplating, in which it is able to intercept both a lateral side of the plated base and a peripheral part around the plated parts from the plating solution. <IMAGE>
申请公布号 EP1195454(A3) 申请公布日期 2003.02.12
申请号 EP20010120247 申请日期 2001.08.23
申请人 YAMAMOTO-MS CO, LTD. 发明人 YAMAMOTO, WATARU
分类号 C25D5/02;C25D7/12;C25D17/06;C25D17/10;C25D17/12;H01L21/288 主分类号 C25D5/02
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