发明名称 SUBSTRATE CONVEYING DEVICE AND ATTITUDE CONVERTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a substrate conveying device capable of easily taking in and out a glass substrate to a storage case and conveying the same without breaking and soiling the same. SOLUTION: This substrate conveying device 30 has a base plate 2 on which a lower holding member 12 abutted on a lower end of the substantially vertically stood glass substrate 1, is fixed. A slide plate 3 having a handle 5 on its upper end is vertically slidably mounted on the base plate 2. An interlocking plate 6 rotated around a rotating shaft 7 in interlocking with the sliding of the slide plate 3 is mounted on the base plate 2 and the slide plate 3, and an upper holding part 10 abutted on an upper end of the glass substrate 1 is fixed to an end part of the interlocking plate 6. When the handle 5 is gripped, the glass substrate 1 is held between the upper holding part 10 and the lower holding part 12 to be held in a vertically stood state.
申请公布号 JP2003034428(A) 申请公布日期 2003.02.07
申请号 JP20010218175 申请日期 2001.07.18
申请人 CANON INC 发明人 TAJIMA HISAO
分类号 B25J1/00;B25J15/00;B25J15/08;B65G7/12;B65G49/06;H01L21/677;H01L21/68;(IPC1-7):B65G49/06 主分类号 B25J1/00
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