| 摘要 |
A variable optical attenuator, or VOA, and method of operation is provided. The operational method increases the linearity of the optical signal attenuation versus an applied actuator actuation signal and decreases the attenuation loss sensitivity to actuation signal noise and actuation signal uncertainty. A preferred embodiment has a light emitting waveguide and optionally an output waveguide, a focusing system, a mirror having a reflecting surface, and a mirror actuator. The mirror is operatively connected with a suspension element that returns the mirror to a highest attenuation, or zero actuation, position when the actuator fails to supply a minimal force to the mirror. The preferred embodiment provides better optical attenuation accuracy and enables reductions in both the complexity and cost of control circuitry of the VOA. The present invention may be implemented as a micro-electro-mechanical system, or MEMS, comprising a microstructure having a mirror and a collimator, where the MEMS is coupled to one or more optical fibers.
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