发明名称 Surface acoustic wave element and manufacturing method of the same
摘要 An inexpensive surface acoustic wave apparatus uses a flip chip bonding technique and is capable of reducing an ohmic loss by reducing an electrode electrical resistance and also operates at a high-frequency range. A surface acoustic wave apparatus has a surface acoustic wave element bonded to a package by using a bonding flip chip technique. In the surface acoustic wave element, on a piezoelectric substrate, an IDT electrode, bus bar electrodes, reflector electrodes, relay electrodes, and electrode pads are disposed. Conductive films are disposed on the electrode pads and define a first metallic film, and the conductive films are also disposed on at least any of the bus bar electrodes and the relay electrodes to define a second metallic film.
申请公布号 US2003025422(A1) 申请公布日期 2003.02.06
申请号 US20020189913 申请日期 2002.07.05
申请人 MURATA MANUFACTURING CO., LTD. 发明人 WATANABE HIROKI;IEKI HIDEHARU
分类号 H01L21/60;H03H3/08;H03H9/05;H03H9/10;H03H9/145;H03H9/25;H03H9/64;(IPC1-7):H03H9/10 主分类号 H01L21/60
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