发明名称 Verfahren zum Wachsen von Nanoröhren
摘要 Process for growing nanotubes comprises contacting a substrate (100) having a region (107) covered with a photolacquer (101) and a free region (106) with a compound of a catalytically active metal to form a layer on the substrate; contacting the treated substrate with a basic solution so that the catalytically active metal compound is converted into the corresponding hydroxide of the metal; removing the photolacquer so that the hydroxide remains on the free region of the substrate; reducing the hydroxide to the corresponding metal; and growing nanotubes on the metal. Preferred Features: Iron is used as the catalytically active metal. The catalytically active metal compound is FeCl3 or a solution iron salt. The basic solution is a solution of NH3 having a concentration of 5%. The photolacquer is removed with acetone under the action of ultrasound and rinsing with isopropanol.
申请公布号 DE10113549(C2) 申请公布日期 2003.02.06
申请号 DE2001113549 申请日期 2001.03.20
申请人 INFINEON TECHNOLOGIES AG 发明人 UNGER, EUGEN;KREUPL, FRANZ;GRAHAM, ANDREW
分类号 C01B31/02;C30B23/00;H01L51/30 主分类号 C01B31/02
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