发明名称 |
Verfahren zum Wachsen von Nanoröhren |
摘要 |
Process for growing nanotubes comprises contacting a substrate (100) having a region (107) covered with a photolacquer (101) and a free region (106) with a compound of a catalytically active metal to form a layer on the substrate; contacting the treated substrate with a basic solution so that the catalytically active metal compound is converted into the corresponding hydroxide of the metal; removing the photolacquer so that the hydroxide remains on the free region of the substrate; reducing the hydroxide to the corresponding metal; and growing nanotubes on the metal. Preferred Features: Iron is used as the catalytically active metal. The catalytically active metal compound is FeCl3 or a solution iron salt. The basic solution is a solution of NH3 having a concentration of 5%. The photolacquer is removed with acetone under the action of ultrasound and rinsing with isopropanol. |
申请公布号 |
DE10113549(C2) |
申请公布日期 |
2003.02.06 |
申请号 |
DE2001113549 |
申请日期 |
2001.03.20 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
UNGER, EUGEN;KREUPL, FRANZ;GRAHAM, ANDREW |
分类号 |
C01B31/02;C30B23/00;H01L51/30 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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