| 发明名称 |
Substrate with fluidic channel and method of manufacturing |
| 摘要 |
A method of manufacturing a fluidic channel through a substrate includes etching an exposed section on a first surface of the substrate, and coating the etched section of the substrate. The etching and the coating are alternatingly repeated until the fluidic channel is formed.
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| 申请公布号 |
US2003027426(A1) |
申请公布日期 |
2003.02.06 |
| 申请号 |
US20010919550 |
申请日期 |
2001.07.31 |
| 申请人 |
MILLIGAN DONALD J.;KOCH TIM R.;TRUNINGER MARTHA A.;LAI DIANE W.;EMERY TIMOTHY R.;SMITH J. DANIEL |
发明人 |
MILLIGAN DONALD J.;KOCH TIM R.;TRUNINGER MARTHA A.;LAI DIANE W.;EMERY TIMOTHY R.;SMITH J. DANIEL |
| 分类号 |
B41J2/14;B41J2/16;(IPC1-7):H01L21/302;H01L21/311;H01L21/461 |
主分类号 |
B41J2/14 |
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