发明名称 |
Systems with high density packing of micromachines |
摘要 |
<p>Micromachine systems (100) are provided. An embodiment of such a micromachine system includes a substrate (111, 504) that defines a trench (116, 512). A first microelectromechanical device (110, 502) and a second microelectromechanical device (110, 502) are arranged at least partially within the trench. Each of the microelectromechanical devices incorporates a first portion that is configured to move relative to the substrate. Methods also are provided. <IMAGE></p> |
申请公布号 |
EP1281665(A2) |
申请公布日期 |
2003.02.05 |
申请号 |
EP20020255271 |
申请日期 |
2002.07.29 |
申请人 |
HEWLETT-PACKARD COMPANY |
发明人 |
HARTWELL, PETER G.;WALMSLEY, ROBERT G. |
分类号 |
B81B7/00;B81B3/00;B81B7/04;(IPC1-7):B81B7/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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