CYLINDRICAL TARGET AND ITS PRODUCTION METHOD

摘要

A method of manufacturing a cylindrical target, comprising the steps of disposing a damping member (52) such as carbon felt between a metallic packi ng tube as an inner tube and a cylindrical target material as an outer tube, an d connecting both thereof to each other, whereby the possibility of selection of the target material and the packing tube material supporting the target material is increased, and the cylindrical target can be manufactured easily and re-used.