Wafer chuck having a removable insert

摘要

A vacuum chuck/insert assembly (100) for firmly supporting a semiconductor wafer (106) during wafer processing. The vacuum chuck comprises a chuck (102) and a removable insert (104). The chuck includes a base (108) and a plurality of spacers (112) for holding the insert in spaced relationship to the base of the chuck. The chuck further includes first and second vacuum seals (116, 118) and vacuum ports (128) extending through the base of the chuck. The insert includes a base (132) and a plurality of spacers (136) for holding the wafer in spaced relationship to the base of the insert. The insert further includes a vacuum seal (140) and vacuum ports (146) extending through the base of the insert. During operation, vacuum applied to the vacuum chuck/insert assembly holds the insert firmly in contact with the chuck and the wafer firmly in contact with the insert.