发明名称 SHEET FOR CLEANING MOLD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To enhance manufacturability by heightening the effect of cleaning a mold and shortening time for cleaning work. SOLUTION: A framed sheet 31 for cleaning is composed of a sheet body 31a for the cleaning, which covers the whole mating surface of the mold, and a reinforcing frame 31b which can be arranged along a peripheral part outside a plurality of cavities in the mating surface of the mold. In the sheet body 31a, the first through-holes 31c are formed in places corresponding to the cavities of the mold; slits 31d for an air vent and notched parts 31e for a flow cavity are formed in places corresponding to the air vents of the cavities; the second through-holes 31f are formed in places corresponding to pots of the mold; and slits 31g are formed in places corresponding to runners of the mold. Thus, the effect of cleaning the mold can be heightened.</p>
申请公布号 JP2003033922(A) 申请公布日期 2003.02.04
申请号 JP20010213991 申请日期 2001.07.13
申请人 HITACHI LTD;HITACHI YONEZAWA ELECTRONICS CO LTD 发明人 TSUCHIDA KIYOSHI
分类号 B29C33/72;B29C45/02;B29C45/14;B29C45/17;B29L31/34;H01L21/56;(IPC1-7):B29C33/72 主分类号 B29C33/72
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