| 发明名称 |
Apparatus and method for pressing prober |
| 摘要 |
An apparatus 10 for pressing a prober according to the present invention, which can press a prober 6 on an electrode-forming portion 4 of an inspection substrate 3 at a sufficient pressure by pivoting four split pressure heads 13 separately by a cylinder 16, and ensure an intimate contact between the prober 6 and the elestrode-forming portion 4 of the inspection substrate 3.
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| 申请公布号 |
US6515498(B1) |
申请公布日期 |
2003.02.04 |
| 申请号 |
US20000479940 |
申请日期 |
2000.01.10 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES;NIHON VENTURE KOGYO CO., LTD.;TORAY ENGINEERING CO., LTD. |
发明人 |
KOBAYASHI SHIGETAKA;EBA TOSHIYUKI;TAHARA TAKANORI;SATO KENJI;WADA HIROMITSU |
| 分类号 |
G01R1/06;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/06 |
| 代理机构 |
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