| 摘要 |
An active, optical, piezoelectric actuated modulator allows switching between a reflecting state and an anti-reflecting state. The modulator, or switch, is based on the precise controlling of an air gap between a thin film membrane and a substrate. The thin film membrane is deformed by a miniaturized adaptive material, such as electrostrictive or piezoelectric (PZT) material. Maximum optical reflection is realized when the air gap is equal to a multiple of a quarter wavelength of an impinging optical beam, while anti-reflection is achieved when the thickness of the air gap is equal to zero or is different from a multiple of the quarter wavelength of the optical beam.
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