| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface potential controller which can hold the potential of a measured body at a specific value. SOLUTION: A surface potential sensor 1 includes a potential detection electrode 11 and a distance detection electrode 12. The potential detection electrode 11 outputs a potential distance signal s1 including a distance component corresponding to the distance to the measured body 40 and a potential component corresponding to the potential of the measured body 40. The distance detection electrode 12 outputs a distance signal s2 corresponding to the distance to the measured body 40. A signal processing part 20 removes the distance component from the potential distance signal s1 by using the distance signal s2, generates a potential signal corresponding to the potential Vs of the measured body 40, and inputs a control signal c1 corresponding to the potential signal to an electric charging device 81. |
