| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for heating which enables absorption of measurement errors of a plurality of temperature measuring means. SOLUTION: In the apparatus and the method for heating, the temperature of a predetermined part of a thin plate-like object to be heated which is heated by a heating means for heating a predetermined part, or the temperature of a predetermined part of a support body for the object to be heated is measured by the plurality of temperature-measuring means; and based on the measured result, each of the plurality of temperature measuring means for measuring the temperature of a predetermined part controls the temperature. Power, supplied to each heating means is detected, and the detected result is reflected in temperature control of at least some of temperature control means.
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