发明名称 |
Ceramic heater with thermal pipe for improving temperature uniformity, efficiency and robustness and manufacturing method |
摘要 |
A ceramic heater for heating a substrate in a semiconductor manufacturing apparatus is disclosed. The ceramic heater, which contains a thermal heat pipe made from Graphfoil embedded in, e.g., AIN, permits <1° C. temperature difference from the center to the edge of a substrate in a substrate holder.
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申请公布号 |
US2003019858(A1) |
申请公布日期 |
2003.01.30 |
申请号 |
US20010921369 |
申请日期 |
2001.07.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
DORNFEST CHARLES N.;MORTENSEN HAROLD H.;PALICKA RICHARD J. |
分类号 |
C23C14/54;C23C16/458;C23C16/46;C30B25/10;H01L21/00;(IPC1-7):B23K10/00 |
主分类号 |
C23C14/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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