A ceramic substrate support and methods for fabricating the same are provided. In one embodiment, a ceramic substrate support for supporting a substrate includes a ceramic body and a porous member disposed therein. The ceramic body generally has an upper portion and a lower portion includes a bottom surface. At least one passage is disposed in the lower portion of the ceramic body. A first end of the passage is at least partially closed by the upper portion of the ceramic body. At least one outlet is disposed through the portion of the ceramic body through the upper portion of the ceramic body and fluidly couples the passage to the support surface.
申请公布号
WO03009370(A2)
申请公布日期
2003.01.30
申请号
WO2002US19532
申请日期
2002.06.21
申请人
APPLIED MATERIALS INC.
发明人
KHOLODENKO, ARNOLD, V.;WANG, YOU;KAUSHAL, TONY, S.;KATS, SEMYON, L.