| 摘要 |
A substrate transport apparatus comprising a drive section, an articulated arm, and a gripper. The articulated arm is connected to the drive section. The articulated arm has an end effector for transporting a substrate. The gripper is connected to the end effector for holding the substrate on the end effector. The gripper has at least two actuated contact pads for gripping the substrate. The two actuated contact pads are disposed on the end effector so that when actuated the eontact pads are translated inwards relative to the end effector to grip the substrate and position a center of the substrate to a predetermined location on the end effector irrespective of a dimensional variance of the substrate. |
