发明名称 |
Microfabricated elastomeric valve and pump systems |
摘要 |
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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申请公布号 |
US2003019833(A1) |
申请公布日期 |
2003.01.30 |
申请号 |
US20020150895 |
申请日期 |
2002.05.15 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
UNGER MARC A.;CHOU HOU-PU;THORSEN TODD A.;SCHERER AXEL;QUAKE STEPHEN R. |
分类号 |
G03F7/20;B01L3/00;B81B1/00;B81B3/00;B81B7/00;B81C1/00;B81C99/00;C12Q1/68;F04B17/00;F04B35/04;F04B43/04;F15C5/00;F16K7/00;F16K17/02;F16K99/00;(IPC1-7):C23F1/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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