| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard carbon film deposition method which greatly improves the performance of a tool member in working of cutting tools and more preferably working of soft metals by continuously forming a ceramic hard coating film having wear resistance and the hard carbon film having an excellent lubrication property thereby applying the hard carbon film having the excellent adhesion property to the tool member described above and a hard carbon film coated tool member. SOLUTION: The hard carbon film is continuously formed by a plasma assisted CVD process using the plasma assist from a metallic target by forming the ceramic hard coating film by a magnetron sputtering process on the tool member, then introducing gaseous hydrocarbon into the same system within the same system by using the gaseous hydrocarbon and suppressing the metallic particles metal-sputtered from the metallic target to a range where the metallic particles do not arrive at the substrate, thereby allowing only the electrons released from the metallic target to assist the plasma discharge of the gaseous hydrocarbon.
|
