| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source having high removal capacity for input heat by electron flow toward an upstream electrode, without affecting downstream electrode due to generation of secondary electrons at the upstream electrode. SOLUTION: The ion source is constituted of an electrode 2 for extracting cations produced at a plasma source 13 and accelerating them, and the electrode 2 is installed with a coolant path 5, in which a magnet 6 for separating electron from the cation flow is embedded.
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