PLASMA ENHANCED CVD SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a plasma enhanced CVD system with which the observation over the entire part of a plasma state is possible and the uniformity by the film thickness and film quality can be promptly discriminated from the distribution state of the plasma. SOLUTION: This plasma enhanced CVD system comprises a cathode 21 of a hollow cylindrical shape on one side and a rod-shaped anode 12 in this cylinder on the other and having a circuit for impressing a high-frequency voltage between both electrodes 21 and 12, in which the flank of the cathode 21 of the hollow cylindrical shape is provided with a slit 23 which is perpendicular to its top surface 21a and is longitudinally long within a range from 3 to 10 mm in width W.