发明名称 RESIST COMPOSITION FOR COLUMN SPACER OF LIQUID CRYSTAL DISPLAY ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a resist composition for the column spacers of a liquid crystal display element. SOLUTION: The resist composition contains 10-40 pts.wt. binder resin selected from the group comprising a binder resin of formula (1), a binder resin of formula (2) and a mixture of these, 1-20 pts.wt. polyfunctional monomer having an ethylenically unsaturated bond, 1-10 pts.wt. photoinitiator and 0.001-0.1 pt.wt. epoxy-containing silicon compound. The resist composition is excellent in heat resistance, can form a pattern in an appropriate thickness when the column spacers of a liquid crystal display element are formed and has good flatness and resolution, a good residual film rate and good pattern stability.
申请公布号 JP2003021839(A) 申请公布日期 2003.01.24
申请号 JP20020097720 申请日期 2002.03.29
申请人 ADMS TECHNOLOGY CO LTD 发明人 BAE YOO-LI;CHA HYUK-JIN;LEE JAE-HWAN;HONG SEONG-JAE;LEE KEUN-JOO;JUNG YONG-MAN;CHOI SOOK-YOUNG;RYU MI-SUN;KIM YOUNG KEUN;KIM TAE-YEONG;KIM WOONG;YOO CHUN-WOO;LEE DAE-WOO;KOO DONG-KUN;KWON MOO-HYUN;LEE CHUL-WOO;YOON SANG-IL
分类号 G03F7/027;C08L33/04;G02F1/1339;G03F7/038;G03F7/075 主分类号 G03F7/027
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