METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To enhance a production efficiency of a semiconductor laser element including a constitution of a partly formed diffraction grating 13 or the like. SOLUTION: A method for manufacturing the semiconductor element comprises a step of batch forming a semiconductor laser element having the diffraction grating 13, partly provided at a laser beam emitting end face side or a reflecting end face side on a semiconductor substrate by using a semiconductor processing technique. The method further comprises a first exposure step of electron beam exposing or ion beam exposing for drawing only a diffraction grating region E1 provided with the grating 13 corresponding to a pattern of the grating 13, and a second exposure step of optically exposing or X-ray exposing a region except the region E1 with the region E1 masked.