发明名称 PIEZOELECTRIC THIN FILM, PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC THIN FILM
摘要 <p>PROBLEM TO BE SOLVED: To prepare a piezoelectric thin film having >=90% orientation in the (111) direction without giving thermal influences on the substrate or nearby electric circuits in an annealing process of the piezoelectric thin film. SOLUTION: The piezoelectric thin film contains lead zirconate titanate as the main composition prepared by depositing by a sol-gel method or sputtering. The piezoelectric thin film 15 is subjected to annealing by rapid heating and rapid cooling by irradiating and scanning the whole surface of the thin film 15 with pulse-generated laser light L in spots so as to accelerate crystallization with orientation. The film has >=90% orientation in the (111) direction.</p>
申请公布号 JP2003020226(A) 申请公布日期 2003.01.24
申请号 JP20010205977 申请日期 2001.07.06
申请人 SONY CORP 发明人 HONDA JUNICHI;TAMURA TAKASHI;TAKAHASHI KAZUO;FUJISAWA NORIKATSU;NIHEI YUKARI
分类号 C01G25/00;H01L41/18;H01L41/187;H01L41/39;H01L41/43;(IPC1-7):C01G25/00;H01L41/24 主分类号 C01G25/00
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