SUBSTRATE PROCESSING SYSTEM, METHOD FOR MANAGING SUBSTRATE PROCESSOR, SUBSTRATE PROCESSOR, PROGRAM, AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing system capable of previously preventing the generation of a fault due to mismatching between individual software modules when a software module is installed in a substrate processor. SOLUTION: When a software module 128 is installed in a system control part 100 or a unit control part 115 of a substrate processor 1, the version information of software modules 128 respectively installed in the system control part 100 and the unit control part 115 is stored to construct a version management table 241. A consistency checking part 235 checks the consistency of individual software modules from the table 241 while referring to a check table 242 registering the version information of the software modules 128 having mutual consistency.