| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe scanning device, preventing a temperature drift by reducing the generation quantity of heat of a voice coil motor. SOLUTION: The probe scanning device is equipped with a Z-axis spindle 6Z having a probe mounted on its free end, a voice coil motor 3Z for finely moving the Z-axis spindle 6Z, a Z-axis elastic cylinder 8 housing the Z-axis spindle 6Z coaxially and elastically supporting the free end of the Z-axis spindle 6Z at its free end, X-axis and Y-axis spindles 6X and 6Y, connected to the Z-axis elastic cylinder 8 and voice coil motors 3X and 3Y for driving the X-axis and Y-axis spindles 6X and 6Y. The Z-axis elastic cylinder 8 is composed of a support part 81 fixed to a housing 1, an elastic cylindrical part 82, vertically extended in the Z-direction from the support part 81 and non-elastic cylindrical parts 83 and 84, further extended in the Z-direction from the elastic cylindrical part 82.
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