| 发明名称 |
MATERIAL FOR FORMING PROTECTIVE FILM |
| 摘要 |
<p>PURPOSE: To provide material for forming a protective film, which is excellent in stoppability and flatness when filling stopping material into a via hole. CONSTITUTION: This material for forming a protective film contains an organic solvent and a compound having at least two or more pieces of alicyclic structures.</p> |
| 申请公布号 |
KR20030006966(A) |
申请公布日期 |
2003.01.23 |
| 申请号 |
KR20020027298 |
申请日期 |
2002.05.17 |
| 申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
KOSHIYAMA JUN;WAKIYA KAZUMASA |
| 分类号 |
G03F7/11;G03F7/004;H01L21/3205;H01L21/768;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/11 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
