| 摘要 |
PURPOSE: An exposure apparatus is provided to solve the problems that very high unit cost, and high warming potential, and the heat capacity per unit volume as small as about 1/2 that of water. CONSTITUTION: An exposure apparatus comprises a temperature adjustment unit which adjusts, to a predetermined temperature, a coolant supplied from a coolant generation device which generates a coolant with a predetermined quality, and a control unit which controls a temperature in the apparatus by circulating the coolant adjusted to the predetermined temperature.
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