STEPPER EQUIPMENT CAPABLE OF AUTOMATICALLY ADJUSTING LASER STEP ALIGNMENT FUNCTION

摘要

PURPOSE: Stepper equipment capable of automatically adjusting laser step alignment function is provided to automatically and precisely adjust a laser step alignment(LSA) reflection mirror when alignment laser is not vertically irradiated to a wafer stage. CONSTITUTION: An adjust unit adjusts a reflection angle of the LSA reflection mirror. A micro computer controls the adjust unit. When an error occurs in the telecentricity of the alignment laser reflected by the LSA reflection mirror and irradiated to the wafer state, The adjust unit is driven to control the reflection angle of the LSA reflection mirror.