发明名称 |
CRYSTALLIZING METHOD OF AMORPHOUS FILM AND FABRICATING METHOD OF LCD BY USING THE SAME |
摘要 |
PURPOSE: A crystallizing method of an amorphous film and a method for fabricating a liquid crystal display device by using the method are provided to crystallize an amorphous film by using a second metal catalyst film deposited on predetermined portions by a plurality of independent patterns as seeds. CONSTITUTION: A method for crystallizing an amorphous film includes the steps of forming an amorphous silicon film(13) on a substrate, forming a first catalyst metal film(14) thinly, forming a second catalyst metal layer(16) on a predetermined portion of the amorphous film, and crystallizing the amorphous film by heating. |
申请公布号 |
KR20030005910(A) |
申请公布日期 |
2003.01.23 |
申请号 |
KR20010041378 |
申请日期 |
2001.07.10 |
申请人 |
KYUNGHEE UNIVERSITY;LG.PHILIPS LCD CO., LTD. |
发明人 |
JANG, JIN;KIM, A YEONG;KIM, GYEONG HO |
分类号 |
G02F1/136;C30B1/02;H01L21/20;H01L21/336;H01L29/786 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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