发明名称 CRYSTALLIZING METHOD OF AMORPHOUS FILM AND FABRICATING METHOD OF LCD BY USING THE SAME
摘要 PURPOSE: A crystallizing method of an amorphous film and a method for fabricating a liquid crystal display device by using the method are provided to crystallize an amorphous film by using a second metal catalyst film deposited on predetermined portions by a plurality of independent patterns as seeds. CONSTITUTION: A method for crystallizing an amorphous film includes the steps of forming an amorphous silicon film(13) on a substrate, forming a first catalyst metal film(14) thinly, forming a second catalyst metal layer(16) on a predetermined portion of the amorphous film, and crystallizing the amorphous film by heating.
申请公布号 KR20030005910(A) 申请公布日期 2003.01.23
申请号 KR20010041378 申请日期 2001.07.10
申请人 KYUNGHEE UNIVERSITY;LG.PHILIPS LCD CO., LTD. 发明人 JANG, JIN;KIM, A YEONG;KIM, GYEONG HO
分类号 G02F1/136;C30B1/02;H01L21/20;H01L21/336;H01L29/786 主分类号 G02F1/136
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