FILM FORMING METHOD AND FILM FORMING DEVICE,申请号KR20027016104-传众专利搜索

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发明名称	FILM FORMING METHOD AND FILM FORMING DEVICE
摘要
申请公布号	KR20030007722(A)	申请公布日期	2003.01.23
申请号	KR20027016104	申请日期	2002.11.27
申请人		发明人
分类号	C01B21/064;H01L21/205;C01B21/082;C04B35/583;C23C16/30;C23C16/34;C23C16/36;C23C16/38;H01L21/31;H01L21/318	主分类号	C01B21/064
代理机构		代理人
主权项
地址

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