METHOD FOR CRYSTALLIZING AMORPHOUS FILM AND LCD FABRICATING METHOD EMPLOYING THE SAME

摘要

PURPOSE: A crystallizing method of an amorphous film and a method for fabricating a liquid crystal display device by the same are provided to crystallize an amorphous silicon film by radiating UV light while applying electric fields, thereby reducing the crystallizing time and minimizing the deformation of a large-scaled substrate. CONSTITUTION: A crystallizing method of an amorphous film includes the steps of forming an amorphous silicon film(13) deposited with a catalyst metal(14) on a substrate(11), radiating ultraviolet rays to the amorphous silicon film, and applying electric fields to the amorphous silicon film.