RUN BOX FOR SEMICONDUCTOR FABRICATION PROCESS

摘要

PURPOSE: A run box for semiconductor fabrication process is provided to prevent the oxidation of a metal deposited on a wafer and a lifting phenomenon of photoresist by exhausting air from the inside of the run box to the outside and preventing the inflow of air from the outside into the inside of the run box. CONSTITUTION: A run box(10) is used for storing a wafer cassette for loading a plurality of wafers(5). The run box(10) is formed with a main body(11) and a cover(15). The main box(11) has a space for receiving the wafer cassette(7). The cover(15) has a packing member(13) for sealing an upper portion of the main body(11). A vacuum hose is inserted into one side of the main body(11) in order to exhaust air of the main body to the outside. A hole(11a) is formed at the one side of the main body(11) in order to inject nitrogen gas into the main body(11). A stopper(17) is inserted into the hole(11a).