APPARATUS FOR TRANSFERRING WAFER HAVING SENSOR

摘要

PURPOSE: A wafer transferring apparatus having a sensor is provided to prevent an error of fabrication equipment due to an optical point error of a sensor and detect a loading state of a wafer by using an optical sensor or an approach sensor. CONSTITUTION: A wafer boat is used for loading a plurality of wafers into an electric furnace. A wafer transferring apparatus is used for transferring the wafers from a stage to the wafer boat. The wafer transferring apparatus is formed with a transferring portion(100), a fork(110), and a sensor(120). A driving portion operates the transferring portion(100). The transferring portion(100) is formed with five stages. The fork(110) is installed at each stage of the transferring portion(100). The wafers are loaded on the forks(110) installed at each stage of the transferring portion(100). The sensor(130) senses the presence of the wafers loaded on the forks(110).