发明名称 |
Method and apparatus for testing semiconductor integrated circuit, and semiconductor integrated circuit manufactured thereby |
摘要 |
A semiconductor integrated circuit testing apparatus of the invention comprises a correcting means for correcting input waveform timing of a measuring signal applied to all pins of a semiconductor integrated circuit 5. The correcting means includes: a high-speed clock generating circuit 12 for generating a clock signal; latch circuits 9a, 9b for latching the measuring signal by use of the clock signal from the high-speed clock generating circuit 12; FIFO memories 10a, 10b for storing as data the measuring signal latched by the latch circuits 9a, 9b; and a control circuit 14 for retrieving the data from the FIFO memories 10a, 10b for transfer to a tester.
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申请公布号 |
US2003016041(A1) |
申请公布日期 |
2003.01.23 |
申请号 |
US20010766845 |
申请日期 |
2001.01.23 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
UEDA KIYOTOSHI;OOSHITA SHOICHI |
分类号 |
G01R31/28;G01R31/319;H01L21/822;H01L27/04;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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