摘要 |
<p>Two control valves 2A and 2B each include a valve mechanism portion 4A, 4B for opening and closing a fluid flow path 12a by displacement of a diaphragm valve 14 and a cylinder operating portion 5A, 5B for opening and closing the diaphragm valve 14 with a valve rod 25 to which a plurality of pistons 24 are connected. The control valves 2A and 2A are provided in casings 7 and 8 connected to each other, whereby the control valves 2A and 2B are integrated with each other. Flow paths 12b, 12b for connecting the control valves 2A and 2B are provided in the casing 7. <IMAGE></p> |